● 高分辨率(1納米)，重復精度(100納米)和精度(200納米)
● 定位穩定性<1納米
● 抗蠕變交叉滾子軸承
● 高動態性能
Noncontact Direct-Drive
All of the original ANT series direct-drive advantages have been preserved in the ANT95-V family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-V stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demａnd smooth and precise motion.
Flexible System Design
The ANT95-V family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-V stage industry-leading 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
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