當前位置：北京艾瑪特科技有限公司>>高精密定位平臺>>精密轉臺>>WaferMax T機械軸承精密直驅轉臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

WaferMax T機械軸承精密直驅轉臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

Name: WaferMax T機械軸承精密直驅轉臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage
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聯系方式：李志剛查看聯系方式

更新時間：2024-09-17 07:26:28瀏覽次數：194次

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北京艾瑪特科技有限公司

經營模式：代理商

商鋪產品：365條

所在地區：北京北京市

聯系人：李志剛（銷售工程師）

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產品簡介

Aerotech的 WaferMax T 轉臺是需要低高度封裝結構提供高性能應用的理想選擇。最初設計用于滿足精密晶片檢測的需求，WaferMax T已經被應用到多種應用。需要有限旋轉時，標準25毫米孔徑允許真空線容易直通穿過。如果連續旋轉是必要的，可選的單或雙端口旋轉接頭可以合并。臺面包括一個標準的安裝模式，其允許晶片易于卡盤安裝。

詳細介紹

● 薄型封裝結構適用于空間有限的應用
● 直接驅動無刷無槽伺服電機
● 直接耦合的高精度旋轉編碼器
● 25毫米孔徑
● 可選配用于真空環境的旋轉接頭

機械設計

Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.

Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.

無刷直驅

To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.

精確定位

Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.

靈活配置

Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

關鍵詞：編碼器

WaferMax T機械軸承精密直驅轉臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

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WaferMax T機械軸承精密直驅轉臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

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